BaTiO3 nanocomposite thin films as pyroelectric sensor

Muhamad Mat Salleh; Azmi Ibrahim; Muhammad Yahaya

doi:10.1117/12.607717

1 July 2005 BaTiO₃ nanocomposite thin films as pyroelectric sensor

Muhamad Mat Salleh, Azmi Ibrahim, Muhammad Yahaya

Proceedings Volume 5836, Smart Sensors, Actuators, and MEMS II; (2005) https://doi.org/10.1117/12.607717
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

BaTiO₃ thin films are commonly used as a pyroelecrtic sensor because this material has a good dielectric, ferroelectric and piezoelectric properties. This paper reports the pyroelectric sensor performance of BaTiO₃/SiO₂ nanocomposite thin films. The BaTiO₃ nanoparticles were synthesized and deposited as nanocomposite thin films on Si/SiO₂ substrates using spin coating technique. The deposited films were dried at 200 °C for 2 hours and annealed at 700 °C for 1 hour in air. Pyroelectric performance of the fabricated sensors was carried out at temperature in the range of 30 to 58 °C using short-circuit current method. The heating rate was set up to 0.4 °C/s. It was found the devices showed the pyroelectric response when heated and the pyroelectric coefficients of the devices are in the range of 43-1300 μC cm^-2 K^-1.

Citation Download Citation

Muhamad Mat Salleh, Azmi Ibrahim, and Muhammad Yahaya "BaTiO₃ nanocomposite thin films as pyroelectric sensor", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); https://doi.org/10.1117/12.607717

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