High-Q micro-machined piezoelectric mechanical filters using coupled cantilever beams

Meiling Zhu; Paul B. Kirby

doi:10.1117/12.607248

1 July 2005 High-Q micro-machined piezoelectric mechanical filters using coupled cantilever beams

Meiling Zhu, Paul B. Kirby

Proceedings Volume 5836, Smart Sensors, Actuators, and MEMS II; (2005) https://doi.org/10.1117/12.607248
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

A new structure for micro-machined piezoelectric mechanical filters with high-Q is presented. The structure is composed of two silicon cantilevers which have thin film PZT transducers deposited on top of each and are mechanically connected together by a silicon linkage. A model is proposed in which finite element analysis (FEA) is combined with a two-port microwave network representation to show high-Q characteristics. Using the model, key parameters in the design include the substrate thickness, and the position, length and width of the linkage, and the effect of these on filter performance, including the resonant frequencies of the in-phase and out-of-phase vibrational modes, bandwidth, quality factor (Q), insertion loss and ripple are also investigated. The results show that the coupling produces additional resonances compared with ladder type filters composed of uncoupled cantilevers, and a significant increase in Q of about a few hundred times higher with correct design, than uncoupled cantilevers.

Citation Download Citation

Meiling Zhu and Paul B. Kirby "High-Q micro-machined piezoelectric mechanical filters using coupled cantilever beams", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); https://doi.org/10.1117/12.607248

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