Optical microlenses for MOEMS

Roberto Carasco; Jan A. Dziuban; Ignacio Moreno; Christophe Gorecki; Lukasz Nieradko; Rafal Walczak; Malgorzata Kopytko; Michal Jozwik

doi:10.1117/12.607912

1 July 2005 Optical microlenses for MOEMS

Roberto Carasco, Jan A. Dziuban, Ignacio Moreno, Christophe Gorecki, Lukasz Nieradko, Rafal Walczak, Malgorzata Kopytko, Michal Jozwik

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Proceedings Volume 5836, Smart Sensors, Actuators, and MEMS II; (2005) https://doi.org/10.1117/12.607912
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

A new concept of the fabrication process for glass microlenses (external diameter ED<1 mm, focal length a few millimeters), based on the silicon master mask-less anisotropic wet etching in KOH, vacuum anodic bonding and re-flow of borosilicate glass, followed by the precise wafer-scale polishing and DRIE has been presented. A single spherical microlens as well as an array of spherical microlenses with focal length between 44.8 and 8.6 mm and external diameter 0.35 to 0.985 mm have been repeatable manufactured.

Citation Download Citation

Roberto Carasco, Jan A. Dziuban, Ignacio Moreno, Christophe Gorecki, Lukasz Nieradko, Rafal Walczak, Malgorzata Kopytko, and Michal Jozwik "Optical microlenses for MOEMS", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); https://doi.org/10.1117/12.607912

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