Double optical monitoring of time-dependent film formation

Alexandre F. Michels; Thiago Menegotto; Hans-Peter H. Grieneisen; Celso V. Santilli; Flavio Horowitz

doi:10.1117/12.617967

22 August 2005 Double optical monitoring of time-dependent film formation

Alexandre F. Michels, Thiago Menegotto, Hans-Peter H. Grieneisen, Celso V. Santilli, Flavio Horowitz

Proceedings Volume 5870, Advances in Thin-Film Coatings for Optical Applications II; 58700C (2005) https://doi.org/10.1117/12.617967
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

A brief overview of optical monitoring for vacuum and wet bench film deposition processes is presented. Interferometric and polarimetric measurements are combined with regard to simultaneous real-time monitoring of refractive index and physical thickness. Monitor stability and accuracy are verified with transparent oil standards. This double optical technique is applied to dip coating with a multi-component Zirconyl Chloride aqueous solution, whose time varying refractive index and physical thickness curves indicate significant sensitivity to changes of film flow properties during the process.

Citation Download Citation

Alexandre F. Michels, Thiago Menegotto, Hans-Peter H. Grieneisen, Celso V. Santilli, and Flavio Horowitz "Double optical monitoring of time-dependent film formation", Proc. SPIE 5870, Advances in Thin-Film Coatings for Optical Applications II, 58700C (22 August 2005); https://doi.org/10.1117/12.617967

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