High performance Fizeau and scanning white-light interferometers for mid-spatial frequency optical testing of free-form optics

Leslie L. Deck; Chris Evans

doi:10.1117/12.616874

31 August 2005 High performance Fizeau and scanning white-light interferometers for mid-spatial frequency optical testing of free-form optics

Leslie L. Deck, Chris Evans

Author Affiliations +

Proceedings Volume 5921, Advances in Metrology for X-Ray and EUV Optics; 59210A (2005) https://doi.org/10.1117/12.616874
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

Two specially-designed visible-wavelength interferometers meet demanding performance requirements in the mid-spatial frequency regime for current and next generation free-form x-ray and EUV optics. A Fizeau phase shifting interferometer measures waviness in the spatial frequency range from 0.5 to 10 mm^-1 and an interferometric microscope measures finer-scale deviations from 1 to 1000 mm^-1. Uncertainty analysis and experimental work demonstrate <1-nm system error after calibration and 0.05-nm repeatability for both instruments working in a clean-room environment.

Citation Download Citation

Leslie L. Deck and Chris Evans "High performance Fizeau and scanning white-light interferometers for mid-spatial frequency optical testing of free-form optics", Proc. SPIE 5921, Advances in Metrology for X-Ray and EUV Optics, 59210A (31 August 2005); https://doi.org/10.1117/12.616874

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