Paper
18 August 2005 Selective growth of conjugated polymer thin film with nanoscale controlling by chemical vapor depositions (CVD) toward 'Nanonics'
Yoshiyuki Suzuki D.V.M., Hayato Kazama, Nobuhiro Terasawa, Yoshimi Naito, Tetsuzo Yoshimura, Yukihiko Arai, Kunihiko Asama
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Abstract
We present a novel polymer-chain-controlling and selective growth technique to make high-index-contrast (HIC) waveguides and photonic crystals. In the present work, poly-azomethine (poly-AM) films that are conjugated polymer were grown on substrates with surface treatment by chemical vapor deposition (CVD) using p-phenylenediamine (PPDA) and terephthalaldehyde (TPA) as reactive source monomers. For polymer chain controlling, poly-AM films were grown by CVD on SiO film, which was obliquely evaporated on a substrate tilted along the y-axis. The chains on the SiO film were found to be aligned along the y-axis. For selective growth, on a glass substrate surface, where a hydrophobic treatment was applied using hexamethyl-disilazane (HMDS), a hydrophilic SiO thin film was deposited through a metal mask by the vacuum evaporation to form a hydrophilic/hydrophobic pattern. The poly-AM thin film was found to be selectively grown on the SiO region, that is, on the hydrophilic region, without growth on the hydrophobic region. These results demonstrate a potentiality of the proposed technique to provide a wide range of three-dimensional fine structures.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yoshiyuki Suzuki D.V.M., Hayato Kazama, Nobuhiro Terasawa, Yoshimi Naito, Tetsuzo Yoshimura, Yukihiko Arai, and Kunihiko Asama "Selective growth of conjugated polymer thin film with nanoscale controlling by chemical vapor depositions (CVD) toward 'Nanonics'", Proc. SPIE 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II, 59310G (18 August 2005); https://doi.org/10.1117/12.614795
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KEYWORDS
Polymers

Polymer thin films

Chemical vapor deposition

Head-mounted displays

Glasses

Photonic crystals

Polymer multimode waveguides

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