Paper
5 October 2005 Optical sensitivity of thin films to hydrocarbons and ozone
Thomas Mazingue, Lorenzo Spalluto, Ludovic Escoubas, Francois Flory, Miroslav Jelinek, Ion Mihalescu, Eliana Kaminska, Anna Piotrowska, Alessio Perrone
Author Affiliations +
Abstract
Materials involved in gas sensing applications have been deposited by various methods in thin film form. Variation of the optical properties of the thin films were investigated under butane and ozone exposure using the m-lines technique. Effective index variations down to 10-4 were observed. Concentrations of 100 ppm of butane diluted in the air or in nitrogen were detected.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas Mazingue, Lorenzo Spalluto, Ludovic Escoubas, Francois Flory, Miroslav Jelinek, Ion Mihalescu, Eliana Kaminska, Anna Piotrowska, and Alessio Perrone "Optical sensitivity of thin films to hydrocarbons and ozone", Proc. SPIE 5963, Advances in Optical Thin Films II, 59631K (5 October 2005); https://doi.org/10.1117/12.622221
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Refractive index

Thin films

Zinc oxide

Nitrogen

Prisms

Sensors

Temperature metrology

Back to Top