Deposition of broadband antireflection coatings on plastic substrates by evaporation and reactive pulse magnetron sputtering

J. Weber; U. Schulz; N. Kaiser; H. Bartzsch; P. Frach

doi:10.1117/12.625361

5 October 2005 Deposition of broadband antireflection coatings on plastic substrates by evaporation and reactive pulse magnetron sputtering

J. Weber, U. Schulz, N. Kaiser, H. Bartzsch, P. Frach

Author Affiliations +

Proceedings Volume 5963, Advances in Optical Thin Films II; 596327 (2005) https://doi.org/10.1117/12.625361
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

Evaporation and reactive pulse magnetron sputtering are two methods to deposit broadband antireflection coatings at low temperatures. The performance of broadband antireflective coatings on polycarbonate (PC) deposited by these methods is shown. Plasma-treatment of the plastic substrates has an important effect on the adhesion of the coating system on the substrate. For sputtering different parameter sets for the pre-treatment as well as the deposition pressure and their effect on adhesion were examined for polycarbonate substrates. Furthermore evaporation and reactive pulse magnetron sputtering were compared with regard to the adhesion of broadband antireflective coatings on PC.

Citation Download Citation

J. Weber, U. Schulz, N. Kaiser, H. Bartzsch, and P. Frach "Deposition of broadband antireflection coatings on plastic substrates by evaporation and reactive pulse magnetron sputtering", Proc. SPIE 5963, Advances in Optical Thin Films II, 596327 (5 October 2005); https://doi.org/10.1117/12.625361

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