We have established a new type of Hartmann-Shack (H-S) wavefront sensor which based on a micro-grating array. A H-S wavefront sensor is frequently used in an Adaptive Optics (AO) system to detect the aberrations for the system. Besides this situation, the H-S wavefront sensor is also adopted to measure those static or dynamic aberrations which exist in other kind of systems. In any one of these H-S wavefront sensors, a lenslet array seems so indispensable. But, it is difficult for a lenslet array to coincide with the photoelectric detector, some times a relay system will be necessary. And the variance of the focal length of the lenslet array will bring error to the measurement. To conquer these deficiencies, a new type of H-S wavefront sensor based on a micro-grating array other than a lenslet array has been created recently. This new kind of H-S wavefront sensor substitutes the lenslet array for a micro-grating array and a lens. On this new H-S wavefront sensor, some excellent experimental results have been obtained.
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