PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
We present the design and fabrication methods for a piezoresistive pressure sensor intended for use in biomedical applications and in particular, pharyngeal manometry. Design requirements are investigated for the sensors size, pressure range and frequency response. The piezoresistive effect is investigated to determine the crystallographic orientation of the substrate and the position of the piezoresistive elements on the surface of the chip. A design calculation method is derived, and a design approach is proposed that satisfy the requirements of the application. Finally a brief description is given of the fabrication processing steps that could be utilised to realise this design.
Richard L. Petty andAlex J. Hariz
"Design and fabrication of a MEMS-based piezoresistive pressure sensor for use in pharyngeal manometry", Proc. SPIE 6035, Microelectronics: Design, Technology, and Packaging II, 603522 (5 January 2006); https://doi.org/10.1117/12.641109
ACCESS THE FULL ARTICLE
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Richard L. Petty, Alex J. Hariz, "Design and fabrication of a MEMS-based piezoresistive pressure sensor for use in pharyngeal manometry," Proc. SPIE 6035, Microelectronics: Design, Technology, and Packaging II, 603522 (5 January 2006); https://doi.org/10.1117/12.641109