A fast algorithm of Gaussian filtering for three-dimensional surface topography

Jingbo Xu; Yibao Yuan

doi:10.1117/12.664330

20 February 2006 A fast algorithm of Gaussian filtering for three-dimensional surface topography

Jingbo Xu, Yibao Yuan

Proceedings Volume 6041, ICMIT 2005: Information Systems and Signal Processing; 60411C (2006) https://doi.org/10.1117/12.664330
Event: ICMIT 2005: Merchatronics, MEMS, and Smart Materials, 2005, Chongqing, China

Abstract

The 2D Gaussian filter was realized in approximation method. A fast algorithm of 2D Gaussian filtering is presented to determine the reference surface for 3D surface topography. The 2D Gaussian filter can be separated into two 1D Gaussian filters, an x-direction Gaussian filter and a y-direction Gaussian filter. A 1D Gaussian filter can be implemented approximately by the cascaded moving average filters. More cascaded moving average filters result in higher filtering accuracy. A recursive algorithm for 2D Gaussian filtering is deduced from a moving average algorithm. This algorithm requires only some simple mathematical operations such as addition, subtraction and a small number of multiplications, so that it has considerable computational efficiency which is very important for 3D surface topography measurement.

Citation Download Citation

Jingbo Xu and Yibao Yuan "A fast algorithm of Gaussian filtering for three-dimensional surface topography", Proc. SPIE 6041, ICMIT 2005: Information Systems and Signal Processing, 60411C (20 February 2006); https://doi.org/10.1117/12.664330

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