Advancing three-dimensional MEMS by complimentary laser micromanufacturing

Jeremy A. Palmer; John D. Williams; Tom Lemp; Tom M. Lehecka; Francisco Medina; Ryan B. Wicker

doi:10.1117/12.641244

23 January 2006 Advancing three-dimensional MEMS by complimentary laser micro manufacturing

Jeremy A. Palmer, John D. Williams, Tom Lemp, Tom M. Lehecka, Francisco Medina, Ryan B. Wicker

Proceedings Volume 6109, Micromachining and Microfabrication Process Technology XI; 61090A (2006) https://doi.org/10.1117/12.641244
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

This paper describes improvements that enable engineers to create three-dimensional MEMS in a variety of materials. It also provides a means for selectively adding three-dimensional, high aspect ratio features to pre-existing PMMA micro molds for subsequent LIGA processing. This complimentary method involves in situ construction of three-dimensional micro molds in a stand-alone configuration or directly adjacent to features formed by x-ray lithography. Three-dimensional micro molds are created by micro stereolithography (MSL), an additive rapid prototyping technology. Alternatively, three-dimensional features may be added by direct femtosecond laser micro machining. Parameters for optimal femtosecond laser micro machining of PMMA at 800 nanometers are presented. The technical discussion also includes strategies for enhancements in the context of material selection and post-process surface finish. This approach may lead to practical, cost-effective 3-D MEMS with the surface finish and throughput advantages of x-ray lithography. Accurate three-dimensional metal microstructures are demonstrated. Challenges remain in process planning for micro stereolithography and development of buried features following femtosecond laser micro machining.

Citation Download Citation

Jeremy A. Palmer, John D. Williams, Tom Lemp, Tom M. Lehecka, Francisco Medina, and Ryan B. Wicker "Advancing three-dimensional MEMS by complimentary laser micro manufacturing", Proc. SPIE 6109, Micromachining and Microfabrication Process Technology XI, 61090A (23 January 2006); https://doi.org/10.1117/12.641244

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