Fabrication of dual grating reflectors for high-power laser diodes

Jason K. O'Daniel; Oleg V. Smolski; Eric G. Johnson

doi:10.1117/12.659900

23 January 2006 Fabrication of dual grating reflectors for high-power laser diodes

Jason K. O'Daniel, Oleg V. Smolski, Eric G. Johnson

Proceedings Volume 6110, Micromachining Technology for Micro-Optics and Nano-Optics IV; 61100O (2006) https://doi.org/10.1117/12.659900
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

A dual grating reflector is a scheme for wavelength stabilization of laser diodes. The fabrication of a dual grating reflector involves the fabrication of a grating coupler on the p-side of a laser diode and a feedback grating on the n-side of the same device. The basic theory of the dual grating reflector is presented, along with the methods used to determine the required tolerances for near optimum performance. The fabrication processes used to obtain the required tolerances needed for a dual grating reflector are presented.

Citation Download Citation

Jason K. O'Daniel, Oleg V. Smolski, and Eric G. Johnson "Fabrication of dual grating reflectors for high-power laser diodes", Proc. SPIE 6110, Micromachining Technology for Micro-Optics and Nano-Optics IV, 61100O (23 January 2006); https://doi.org/10.1117/12.659900

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