Large scale nanolaminate deformable mirror

Alexandros Papavasiliou; Scot Olivier; Troy Barbee; Robin Miles; Kevin Chang

doi:10.1117/12.657666

23 January 2006 Large scale nanolaminate deformable mirror

Alexandros Papavasiliou, Scot Olivier, Troy Barbee, Robin Miles, Kevin Chang

Proceedings Volume 6113, MEMS/MOEMS Components and Their Applications III; 61130Q (2006) https://doi.org/10.1117/12.657666
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

This work concerns the development of a technology that uses Nanolaminate foils to form light-weight, deformable mirrors that are scalable over a wide range of mirror sizes. While MEMS-based deformable mirrors and spatial light modulators have considerably reduced the cost and increased the capabilities of adaptive optic systems, there has not been a way to utilize the advantages of lithography and batch-fabrication to produce large-scale deformable mirrors. This technology is made scalable by using fabrication techniques and lithography that are not limited to the sizes of conventional MEMS devices. Like many MEMS devices, these mirrors use parallel plate electrostatic actuators. This technology replicates that functionality by suspending a horizontal piece of nanolaminate foil over an electrode by electroplated nickel posts. This actuator is attached, with another post, to another nanolaminate foil that acts as the mirror surface. Most MEMS devices are produced with integrated circuit lithography techniques that are capable of very small line widths, but are not scalable to large sizes. This technology is very tolerant of lithography errors and can use coarser, printed circuit board lithography techniques that can be scaled to very large sizes. These mirrors use small, lithographically defined actuators and thin nanolaminate foils allowing them to produce deformations over a large area while minimizing weight. This paper will describe a staged program to develop this technology. First-principles models were developed to determine design parameters. Three stages of fabrication will be described starting with a 3x3 device using conventional metal foils and epoxy to a 10-across all-metal device with nanolaminate mirror surfaces.

Citation Download Citation

Alexandros Papavasiliou, Scot Olivier, Troy Barbee, Robin Miles, and Kevin Chang "Large scale nanolaminate deformable mirror", Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130Q (23 January 2006); https://doi.org/10.1117/12.657666

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available