Structure and properties of diamond-like carbon coatings on large area infrared elements

Qiantao Li; Changxin Xiong; Mi Zhu

doi:10.1117/12.674243

9 June 2006 Structure and properties of diamond-like carbon coatings on large area infrared elements

Qiantao Li, Changxin Xiong, Mi Zhu

Proceedings Volume 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 61491J (2006) https://doi.org/10.1117/12.674243
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

In this paper, high quality DLC coatings on large area (φ=150 ~ 250mm) infrared elements have been prepared by radio frequency enhanced plasma chemical vapor deposition (RF-PECVD) method. The microstructure has been studied by using Raman spectroscopy and FTIR spectroscopy. These DLC coatings show good uniformity, high infrared transmittance and resistance to harsh environment. The relations between RF power density, the microstructure and properties have been discussed

Citation Download Citation

Qiantao Li, Changxin Xiong, and Mi Zhu "Structure and properties of diamond-like carbon coatings on large area infrared elements", Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 61491J (9 June 2006); https://doi.org/10.1117/12.674243

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