Resolution improvement of one-dimensional comb-type PSD by subdivision

Meide Lin; Bin Lin; Xunjun Qi; Xiangqun Cao; Ruiqi Long; Chilie Tan

doi:10.1117/12.677971

19 May 2006 Resolution improvement of one-dimensional comb-type PSD by subdivision

Meide Lin, Bin Lin, Xunjun Qi, Xiangqun Cao, Ruiqi Long, Chilie Tan

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 61500B (2006) https://doi.org/10.1117/12.677971
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

Implementation of a 4 by 1 comb-type Position sensitive detector (PSD) array for position sensing applications is presented. Unlike conventional application, we utilize the method of subdivision to increase the resolution of PSD beyond the feature of photosensitive area, which is presented periodically. To obtain output signal of comb-type PSD, classic grating subdivision circuit is used. Resolution of 6.25μm of comb-type PSD is achieved using optical grating array of a 50μm in pitch and signal power of 3mW. The resolution is limited by the spacing of comb-type PSD and the mismatch of position of PSD array and optical grating array.

Citation Download Citation

Meide Lin, Bin Lin, Xunjun Qi, Xiangqun Cao, Ruiqi Long, and Chilie Tan "Resolution improvement of one-dimensional comb-type PSD by subdivision", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61500B (19 May 2006); https://doi.org/10.1117/12.677971

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