Modeling of substrate current measurement and charge transfer in insulators

Yeong-Uk Ko; Keizo Yamada; Takeo Ushiki; Robert Newcomb

doi:10.1117/12.656491

24 March 2006 Modeling of substrate current measurement and charge transfer in insulators

Yeong-Uk Ko, Keizo Yamada, Takeo Ushiki, Robert Newcomb

Proceedings Volume 6152, Metrology, Inspection, and Process Control for Microlithography XX; 615230 (2006) https://doi.org/10.1117/12.656491
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

We compare substrate current (SC) values for thin SiO₂ films, with thicknesses ranging from 2 nm to 200 nm, between modeled simulation results and actual measurements made by EB-SCOPE, a substrate current measuring instrument. The simulation models use Monte Carlo methods to model the generation of secondary electrons (SE) and holes, and use 1-D charge transfer to simultaneously model SE yield and SC values to quantify thin film thickness in order to predict if a high aspect ratio contact or via hole is closed or open. The simulation results show a strong match with the measurement data. The SC value can be used for assessing process uniformity as well as detecting process related failures, in this case a closed contact hole which can be seen in the qualitative SC images. We can also apply this modeling to monitoring of surface preparation and clean processes to detect residual films such as SiO₂. The method can detect changes in surface state conditions, such as residue or oxide formation, as changes in SC values.

Citation Download Citation

Yeong-Uk Ko, Keizo Yamada, Takeo Ushiki, and Robert Newcomb "Modeling of substrate current measurement and charge transfer in insulators", Proc. SPIE 6152, Metrology, Inspection, and Process Control for Microlithography XX, 615230 (24 March 2006); https://doi.org/10.1117/12.656491

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available