Metal resistor bolometer on GaAs substrate

P. Macháč; L. Ryć

doi:10.1117/12.675640

18 April 2006 Metal resistor bolometer on GaAs substrate

P. Macháč, L. Ryć

Proceedings Volume 6180, Photonics, Devices, and Systems III; 618005 (2006) https://doi.org/10.1117/12.675640
Event: Photonics, Devices, and Systems III, 2005, Prague, Czech Republic

Abstract

A metal resistor bolometer for the detection of x-ray emission from laser plasma has been designed and fabricated. The bolometer is placed on a thin polymeric foil with the use of thin film technology. The foil is suspended on a GaAs substrate. The Au/Pt/Ti thin film resistor of 2000 Ω resistance and 0.19 %/K temperature coefficient is used for sensing temperature. A detection head equipped with the bolometer and accompanying read-out electronics has been fabricated and used in a plasma experiment.

Citation Download Citation

P. Macháč and L. Ryć "Metal resistor bolometer on GaAs substrate", Proc. SPIE 6180, Photonics, Devices, and Systems III, 618005 (18 April 2006); https://doi.org/10.1117/12.675640

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