Paper
20 April 2006 Two-dimensional photonic crystals from semiconductor material with polymer filled holes
Author Affiliations +
Abstract
Polymer filling of the air holes of indiumphosphide based two-dimensional photonic crystals is reported. The filling is performed by infiltration with a liquid monomer and solidification of the infill in situ by thermal polymerization. Complete hole filling is obtained with infiltration under ambient pressure. This conclusion is based both on cross-sectional scanning electron microscope inspection of the filled samples as well as on optical transmission measurements.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rob van der Heijden D.D.S., Charlotte Kjellander, Carl-Fredrik Carlström, Juri Snijders, Rob W. van der Heijden, Kees Bastiaansen, Dick Broer, Fouad Karouta, Richard Nötzel, Emile van der Drift, and Huub W. M. Salemink "Two-dimensional photonic crystals from semiconductor material with polymer filled holes", Proc. SPIE 6182, Photonic Crystal Materials and Devices III (i.e. V), 618214 (20 April 2006); https://doi.org/10.1117/12.662660
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KEYWORDS
Polymers

Photonic crystals

Liquids

Scanning electron microscopy

Polymerization

Waveguides

Etching

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