Fabrication, characterization, and reliability study of AlN-driven cantilevers

A. Andrei; K. Krupa; M. Jozwik; L. Nieradko; C. Gorecki; L. Hirsinger; P. Delobelle

doi:10.1117/12.663526

28 April 2006 Fabrication, characterization, and reliability study of AlN-driven cantilevers

A. Andrei, K. Krupa, M. Jozwik, L. Nieradko, C. Gorecki, L. Hirsinger, P. Delobelle

Proceedings Volume 6188, Optical Micro- and Nanometrology in Microsystems Technology; 61880S (2006) https://doi.org/10.1117/12.663526
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

The goal of this study was the investigation of reliability of AlN driven cantilevers, operating as MEMS actuators. Some of the fabrication steps being critical in regards to reliability issues, these steps have been firstly optimized. Then the monitoring of fatigue effects produced by thermal loading (130° C) of cantilevers, introducing the evolution of micromechanical parameters has been obtained by Twyman-Green interferometry. The measurements of evolution of resonance frequencies and displacement amplitudes permit the estimation of the long-term stability of such AlN based actuators.

Citation Download Citation

A. Andrei, K. Krupa, M. Jozwik, L. Nieradko, C. Gorecki, L. Hirsinger, and P. Delobelle "Fabrication, characterization, and reliability study of AlN-driven cantilevers", Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 61880S (28 April 2006); https://doi.org/10.1117/12.663526

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