MEMS-based force-detected nuclear magnetic resonance (FDNMR) spectrometer

Choonsup Lee; Mark C. Butler; Ramez A. Elgammal; Thomas George; Brian Hunt; Daniel P. Weitekamp

doi:10.1117/12.665692

5 May 2006 MEMS-based force-detected nuclear magnetic resonance (FDNMR) spectrometer

Choonsup Lee, Mark C. Butler, Ramez A. Elgammal, Thomas George, Brian Hunt, Daniel P. Weitekamp

Proceedings Volume 6223, Micro (MEMS) and Nanotechnologies for Space Applications; 622302 (2006) https://doi.org/10.1117/12.665692
Event: Defense and Security Symposium, 2006, Orlando (Kissimmee), Florida, United States

Abstract

The motivation for the work reported is portable NMR spectroscopy of liquids and solids with higher sensitivity than inductive detection and without the need for tuned elements specific to the frequency of each isotope observed. The fabrication and assembly of a BOOMERANG force-detected nuclear magnetic resonance (NMR) spectrometer is reported. The design is optimal for samples of ~ 50 micron diameter and realizes tolerances of ~1 micron in the Si and ferromagnetic parts. Optical lithography, electrodeposition, reactive ion etching, and release of the moving part by solution etching are key methods used. Resistance to delamination of the ferromagnetic material was achieved by Cr/Au deposition prior to electrodeposition of 85/15 Co:Ni.

Citation Download Citation

Choonsup Lee, Mark C. Butler, Ramez A. Elgammal, Thomas George, Brian Hunt, and Daniel P. Weitekamp "MEMS-based force-detected nuclear magnetic resonance (FDNMR) spectrometer", Proc. SPIE 6223, Micro (MEMS) and Nanotechnologies for Space Applications, 622302 (5 May 2006); https://doi.org/10.1117/12.665692

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available