Development of automatic 3D profile measuring system

Hong-Tsu Young; WeiYen Lin

doi:10.1117/12.716135

13 October 2006 Development of automatic 3D profile measuring system

Hong-Tsu Young, WeiYen Lin

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 628011 (2006) https://doi.org/10.1117/12.716135
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

The objective of this research is to develop a non-contact measurement system for micro-scale 3D geometry. The core of the system is based on Shape-from-Focus method. Corresponding digital images were taken at different heights with predefined step interval. The images taken were enhanced by image processing techniques including discrete Gaussian filtering and histogram equalization. The degree of the focused image was quantified and, then the height of each pixel was determined with Gaussian Interpolation. 3D geometry model of the specimen can be reconstructed. The system developed was verified with a standard sphere of radius 225 μm. The result gave the average radius of 221.56 μm with the standard deviation 8.95 μm. Feasibility of the measuring system was confirmed with satisfactory precision level.

Citation Download Citation

Hong-Tsu Young and WeiYen Lin "Development of automatic 3D profile measuring system", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 628011 (13 October 2006); https://doi.org/10.1117/12.716135

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