Comparative mirror cleaning study: a study on removing particulate contamination

Karrie D. Houston

doi:10.1117/12.683231

7 September 2006 Comparative mirror cleaning study: a study on removing particulate contamination

Karrie D. Houston

Proceedings Volume 6291, Optical Systems Degradation, Contamination, and Stray Light: Effects, Measurements, and Control II; 629107 (2006) https://doi.org/10.1117/12.683231
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

A mirror cleaning study was conducted to assess the effectiveness of three cleaning methods in their ability to remove particulate contamination from reflective mirror surfaces. Presently, the detergent bath, solvent rinse, and CO₂ snow cleaning methods are the most commonly used optical cleaning techniques within the optics industry. These techniques are also commonly used by the Optics Branch/Code 551 at Goddard Space Flight Center (GSFC) to remove particulate contamination from optical surfaces. In this experimental study, the above-mentioned cleaning methods were used to clean twelve uncoated silicon wafers, twelve gold coated silicon wafers, and twelve gold coated silicon wafers with a silicon oxide protective coating. CO₂ snow cleaning had an average removal percentage of 84%, followed by the solvent rinse at 74%, and the detergent bath at 61%. In addition to the average removal percentage, this comparative study was designed to: (1) determine the cleaning ability of each method based on the number and size of removed particles; (2) assess the risk of surface damage for each cleaning procedure; (3) evaluate each cleaning method as a function of its initial "qualitative" contamination level ("fairly clean", "dirty", and "very dirty"). The particulate cleanliness of all wafers was characterized using Image Analysis and Image-Pro Plus 5.0 software. In addition, the experimental design and experimental results were analyzed using JMP/Statistical Analytical Software Version 6.0.

Citation Download Citation

Karrie D. Houston "Comparative mirror cleaning study: a study on removing particulate contamination", Proc. SPIE 6291, Optical Systems Degradation, Contamination, and Stray Light: Effects, Measurements, and Control II, 629107 (7 September 2006); https://doi.org/10.1117/12.683231

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