Interferometric testing through transmissive media (TTM)

Sen Han

doi:10.1117/12.682089

14 August 2006 Interferometric testing through transmissive media (TTM)

Sen Han

Proceedings Volume 6293, Interferometry XIII: Applications; 629305 (2006) https://doi.org/10.1117/12.682089
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

The TTM objective module was designed to allow interferometric measurement of objects underneath transmissive materials at higher magnifications. For proper functioning, many factors must be optimized, including dispersive compensation, coherence effects, thickness variation insensitivity, and illumination. Measurement results will be presented for through glass, through fluid and dynamic MEMS application examples.

Citation Download Citation

Sen Han "Interferometric testing through transmissive media (TTM)", Proc. SPIE 6293, Interferometry XIII: Applications, 629305 (14 August 2006); https://doi.org/10.1117/12.682089

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