Optimum design of a parallel micro-motion stage

Kunpeng Song; Penghao Hu; Wei Wang; Qun Zheng

doi:10.1117/12.717496

28 October 2006 Optimum design of a parallel micro-motion stage

Kunpeng Song, Penghao Hu, Wei Wang, Qun Zheng

Proceedings Volume 6358, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation; 635804 (2006) https://doi.org/10.1117/12.717496
Event: Sixth International Symposium on Instrumentation and Control Technology, 2006, Beijing, China

Abstract

With the development of a parallel micro motion stage, a Pseudo-Rigid-Body model is derived, and simplified as a constant Jacobian matrix, an optimization based on condition number is then made to establish structure parameters, so as to achieve kinematic performance of both workspace and resulotion as demand, while the scale of this stage is minimized. Finally the simplified model error is calculated and rational control advice is given.

Citation Download Citation

Kunpeng Song, Penghao Hu, Wei Wang, and Qun Zheng "Optimum design of a parallel micro-motion stage", Proc. SPIE 6358, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation, 635804 (28 October 2006); https://doi.org/10.1117/12.717496

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