MOS Si/Ge photodetectors

C.-H. Lin; C. W. Liu

doi:10.1117/12.684994

12 October 2006 MOS Si/Ge photodetectors

C.-H. Lin, C. W. Liu

Proceedings Volume 6368, Optoelectronic Devices: Physics, Fabrication, and Application III; 636806 (2006) https://doi.org/10.1117/12.684994
Event: Optics East 2006, 2006, Boston, Massachusetts, United States

Abstract

The Si metal-oxide-semiconductor structure can be used for light detection, and the dark current is significantly reduced with the oxide layer. With the photo excitation, the generated carriers can be collected by electrodes as photo current. By incorporating Ge, the metal-oxide-semiconductor photodetectors can increase the responsivity and extend the detection wavelength. The interband transitions in the SiGe quantum dots enhance the 820 nm infrared absorption and extend the detection range to 1550nm. The valence band offset between Si and SiGe forms discrete quantum states in the SiGe layers. Hence, metal-oxide-semiconductor SiGe/Si quantum dot (well) infrared photodetectors can be used to detect midand far- infrared using the intraband transitions. The Ge-on-insulator metal-oxide-semiconductor photodetectors can further increase the detection speed by reducing parasitic capacitance. The large work function metal (Pt) is used for the gate electrode to reduce the dark current. Moreover, the external mechanical strain can enhance the photo current with slight degradation of dark current.

Citation Download Citation

C.-H. Lin and C. W. Liu "MOS Si/Ge photodetectors", Proc. SPIE 6368, Optoelectronic Devices: Physics, Fabrication, and Application III, 636806 (12 October 2006); https://doi.org/10.1117/12.684994

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available