Periodic nanoripple generated by femtosecond laser beam in LCVD system

Mingzhen Tang; Haitao Zhang; Jerry McCoy; Tsing-Hua Her

doi:10.1117/12.700745

13 March 2007 Periodic nanoripple generated by femtosecond laser beam in LCVD system

Mingzhen Tang, Haitao Zhang, Jerry McCoy, Tsing-Hua Her

Proceedings Volume 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII; 64620T (2007) https://doi.org/10.1117/12.700745
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

We demonstrate deposition of periodic tungsten nanoripple on different substrate using a single 400nm femtosecond laser beam at room temperature. The laser beam generated by frequency doubling the output from mode-locked 80MHz Ti: sapphire oscillator was applied in a laser-induced chemical vapor deposition configuration, in which tungsten hexacarbonyl was used as precursor. The deposition strongly depended on laser polarization. With linearly polarized light, periodic ripple structure with willow-leaf shape was formed inside the exposure area. The ripple orientation was found parallel to the laser polarization direction. Affects of laser power and exposure time on ripple formation were investigated. By translating the substrate with respective to the laser beam, longitudinal or transverse grating structure was observed. The period of this grating structure is about 150nm on sapphire, and the orientation is parallel to laser polarization. Simply by programming the translation of the substrate, large area patterns and other patterns such as circle and characters were formed. Similar ripple and grating structures observed on all the substrates we investigated, including insulators, semiconductors and metals, implies that ripple formation might be a universal phenomenon. Considering the simplicity of this process and material flexibility of laser CVD, this technique may provide a novel costeffective patterning method to produce periodic subwavelength nanostructures of a wide range of materials on many substrates.

Citation Download Citation

Mingzhen Tang, Haitao Zhang, Jerry McCoy, and Tsing-Hua Her "Periodic nanoripple generated by femtosecond laser beam in LCVD system", Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 64620T (13 March 2007); https://doi.org/10.1117/12.700745

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