Compact and high efficiency polymer air-trench waveguide bends and splitters

Yongbin Lin; Nazli Rahmanian; Seunghyun Kim; Gregory P. Nordin

doi:10.1117/12.701359

7 March 2007 Compact and high efficiency polymer air-trench waveguide bends and splitters

Yongbin Lin, Nazli Rahmanian, Seunghyun Kim, Gregory P. Nordin

Proceedings Volume 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII; 64620V (2007) https://doi.org/10.1117/12.701359
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

A fabrication process for PFCB waveguide air-trench bends with scanning electron microscope (SEM)-based electron beam lithography (EBL) and autoalignment has been developed and high efficiency air-trench bends (97.2% for TE polarization and 96.2% for TM polarization) have been demonstrated. We have successfully developed a high aspect ratio (18:1) anisotropic PFCB etch using a CO/O₂ etch chemistry in an inductively coupled plasma reactive ion etcher (ICP RIE) for PFCB waveguide air-trench splitter fabrication. The fabricated splitters show a 90.1% overall efficiency and ~ 85-to-15 (85:15) splitting ratio for 950 nm wide splitter trench, which closely matches 2D-FDTD simulation results. Using air-trench bends, an ultracompact PFCB arrayed waveguide grating (AWG) 8 x 8 wavelength demultiplexer for Wavelength Division Multiplexing (WDM) application had been designed. Compared to a conventional AWG in the same material system, the air-trench bend AWG reduces the area required by a factor of 20. Compact ring resonators using these splitters and bends has been designed and fabrication and improvements are currently underway.

Citation Download Citation

Yongbin Lin, Nazli Rahmanian, Seunghyun Kim, and Gregory P. Nordin "Compact and high efficiency polymer air-trench waveguide bends and splitters", Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 64620V (7 March 2007); https://doi.org/10.1117/12.701359

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available