A new micro laser camera

Christian Drabe; Richard James; Thomas Klose; Alexander Wolter; Harald Schenk; Hubert Lakner

doi:10.1117/12.700360

22 January 2007 A new micro laser camera

Christian Drabe, Richard James, Thomas Klose, Alexander Wolter, Harald Schenk, Hubert Lakner

Proceedings Volume 6466, MOEMS and Miniaturized Systems VI; 64660I (2007) https://doi.org/10.1117/12.700360
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

A new two-dimensional and resonantly driven scanning micro mirror has been simulated, fabricated and characterized. Features are a small chip size of 2900 μm x 2350 μm with a frame oscillating at frequencies in the range of 1 kHz. The frame carries a mirror of 500 μm diameter in a gimbal mounting oscillating at frequencies in the range of 16 kHz. The characteristic mechanical amplitudes are 21^o and 28^o respectively. Voltages of 60 V and less than 140 V were necessary to accomplish this. Much higher amplitudes have been achieved on the mirror axis without breaking the torsion bars. Initial difficulties in realizing the high amplitudes have been overcome by improving the geometry of the suspension. The initial design is presented as well as the measurement results of the initial and improved design. The device was used to develop a micro laser camera with high depth of focus. Pictures taken with the system are presented revealing the excellent resolution.

Citation Download Citation

Christian Drabe, Richard James, Thomas Klose, Alexander Wolter, Harald Schenk, and Hubert Lakner "A new micro laser camera", Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 64660I (22 January 2007); https://doi.org/10.1117/12.700360

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