Novel development of tiny bimorph mirrors

Alexis Kudryashov; Alexander Sobolev; Vadim Samarkin; Tatiana Cherezova

doi:10.1117/12.710631

14 February 2007 Novel development of tiny bimorph mirrors

Alexis Kudryashov, Alexander Sobolev, Vadim Samarkin, Tatiana Cherezova

Author Affiliations +

Proceedings Volume 6467, MEMS Adaptive Optics; 64670O (2007) https://doi.org/10.1117/12.710631
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

The main disadvantage of contemporary bimorph flexible mirrors is that they used to have rather large aperture. At the same time semipassive bimorph flexible mirror is one of the most widely used devices in various adaptive systems. We present a novel approach of multilayer bimorph (multimorph) mirrors and a numerical model to simulate them, based on a variation approach of the finite elements method in order to reduce the size (diameter) of these wavefront correctors. The multilayer bimorph mirror consists of a substrate and a number of piezoceramic layers. The electrode grid of each layer is determined separately to reproduce low order aberrations. We also present our results in reproduction of the wavefront phase dislocations (vortices) with the help of tiny bimorph mirror.

Citation Download Citation

Alexis Kudryashov, Alexander Sobolev, Vadim Samarkin, and Tatiana Cherezova "Novel development of tiny bimorph mirrors", Proc. SPIE 6467, MEMS Adaptive Optics, 64670O (14 February 2007); https://doi.org/10.1117/12.710631

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