A wafer scale active pixel CMOS image sensor for generic x-ray radiology

Danny Scheffer

doi:10.1117/12.708433

16 March 2007 A wafer scale active pixel CMOS image sensor for generic x-ray radiology

Danny Scheffer

Proceedings Volume 6510, Medical Imaging 2007: Physics of Medical Imaging; 65100O (2007) https://doi.org/10.1117/12.708433
Event: Medical Imaging, 2007, San Diego, CA, United States

Abstract

This paper describes a CMOS Active Pixel Image Sensor developed for generic X-ray imaging systems using standard CMOS technology and an active pixel architecture featuring low noise and a high sensitivity. The image sensor has been manufactured in a standard 0.35 μm technology using 8" wafers. The resolution of the sensor is 3360x3348 pixels of 40x40 μm² each. The diagonal of the sensor measures little over 190 mm. The paper discusses the floor planning, stitching diagram, and the electro-optical performance of the sensor that has been developed.

Citation Download Citation

Danny Scheffer "A wafer scale active pixel CMOS image sensor for generic x-ray radiology", Proc. SPIE 6510, Medical Imaging 2007: Physics of Medical Imaging, 65100O (16 March 2007); https://doi.org/10.1117/12.708433

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