Uncertainty analysis of mircoresonator using classical and interval methods

B. Vasuki; M. Umapathy; G. Uma; M. Shanmugavalli; S. Meenatchisundaram

doi:10.1117/12.716054

30 April 2007 Uncertainty analysis of mircoresonator using classical and interval methods

B. Vasuki, M. Umapathy, G. Uma, M. Shanmugavalli, S. Meenatchisundaram

Proceedings Volume 6528, Nanosensors, Microsensors, and Biosensors and Systems 2007; 652812 (2007) https://doi.org/10.1117/12.716054
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2007, San Diego, California, United States

Abstract

This paper presents an uncertainty analysis of micro electro mechanical systems using analytical methods and interval analysis. Laterally driven polysilicon resonant micro structure is considered to illustrate the analysis.

Citation Download Citation

B. Vasuki, M. Umapathy, G. Uma, M. Shanmugavalli, and S. Meenatchisundaram "Uncertainty analysis of mircoresonator using classical and interval methods", Proc. SPIE 6528, Nanosensors, Microsensors, and Biosensors and Systems 2007, 652812 (30 April 2007); https://doi.org/10.1117/12.716054

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