17 µm pixel 640 x 480 microbolometer FPA development at BAE Systems

Richard J. Blackwell; Tuyet Bach; Dan O'Donnell; Jeannie Geneczko; Michael Joswick

doi:10.1117/12.723474

14 May 2007 17 &mgr;m pixel 640 x 480 microbolometer FPA development at BAE Systems

Richard J. Blackwell, Tuyet Bach, Dan O'Donnell, Jeannie Geneczko, Michael Joswick

Proceedings Volume 6542, Infrared Technology and Applications XXXIII; 65421U (2007) https://doi.org/10.1117/12.723474
Event: Defense and Security Symposium, 2007, Orlando, Florida, United States

Abstract

BAE Systems has developed an advanced 640 x 480 focal plane array (FPA) with a 17 &mgr;m pixel pitch. Sensitivity of ≤ 50 mK was demonstrated and the FPAs were used in imaging demonstrations. Successful scaling of BAE Systems' patented single contact per pixel, single-level microbolometer process to 17 &mgr;m pitch provides a path toward next generation microbolometer imaging systems.

Citation Download Citation

Richard J. Blackwell, Tuyet Bach, Dan O'Donnell, Jeannie Geneczko, and Michael Joswick "17 &mgr;m pixel 640 x 480 microbolometer FPA development at BAE Systems", Proc. SPIE 6542, Infrared Technology and Applications XXXIII, 65421U (14 May 2007); https://doi.org/10.1117/12.723474

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