Finesse of silicon-based terahertz Fabry-Perot spectrometer

Justin W. Cleary; Robert E. Peale; Ravi Todi; Kalpathy Sundaram; Oliver Edwards

doi:10.1117/12.719577

4 May 2007 Finesse of silicon-based terahertz Fabry-Perot spectrometer

Justin W. Cleary, Robert E. Peale, Ravi Todi, Kalpathy Sundaram, Oliver Edwards

Proceedings Volume 6549, Terahertz for Military and Security Applications V; 65490R (2007) https://doi.org/10.1117/12.719577
Event: Defense and Security Symposium, 2007, Orlando, Florida, United States

Abstract

This paper considers factors that affect achievable finesse for a recently demonstrated silicon-based scanning Fabry- Perot transmission filter at millimeter and sub-millimeter wavelengths. The mirrors are formed by alternating quarter-wave optical thicknesses of silicon and air in the usual Bragg configuration. Fundamental loss by lattice and free carrier absorption are considered. Technological factors such as surface roughness, bowing, and misalignment are considered for various proposed manufacturing schemes.

Citation Download Citation

Justin W. Cleary, Robert E. Peale, Ravi Todi, Kalpathy Sundaram, and Oliver Edwards "Finesse of silicon-based terahertz Fabry-Perot spectrometer", Proc. SPIE 6549, Terahertz for Military and Security Applications V, 65490R (4 May 2007); https://doi.org/10.1117/12.719577

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