Silicon cantilever sensor for micro-/nanoscale dimension and force metrology

Erwin Peiner; Lutz Doering; Michael Balke; Andreas Christ

doi:10.1117/12.721951

15 May 2007 Silicon cantilever sensor for micro-/nanoscale dimension and force metrology

Erwin Peiner, Lutz Doering, Michael Balke, Andreas Christ

Proceedings Volume 6589, Smart Sensors, Actuators, and MEMS III; 65890M (2007) https://doi.org/10.1117/12.721951
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain

Abstract

A piezoresistive silicon cantilever-type tactile sensor was described as well as its application for dimensional metrology with micro components and as a transferable force standard in the micro-to-nano Newton range. As an example for tactile probing metrology the novel cantilever sensor was used for surface scanning with calibrated groove and roughness artifacts. Force metrology was addressed based on calibration procedures which were developed for commercial stylus instruments as well as for glass pipettes designed for the characterization of the vital forces of isolated cells.

Citation Download Citation

Erwin Peiner, Lutz Doering, Michael Balke, and Andreas Christ "Silicon cantilever sensor for micro-/nanoscale dimension and force metrology", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65890M (15 May 2007); https://doi.org/10.1117/12.721951

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