3D nanomanufacturing with femtosecond lasers and applications

Sven Passinger; Roman Kiyan; Alexandr Ovsianikov; Carsten Reinhardt; Boris Chichkov

doi:10.1117/12.721714

16 May 2007 3D nanomanufacturing with femtosecond lasers and applications

Sven Passinger, Roman Kiyan, Alexandr Ovsianikov, Carsten Reinhardt, Boris Chichkov

Proceedings Volume 6591, Nanotechnology III; 659104 (2007) https://doi.org/10.1117/12.721714
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain

Abstract

One of the rapidly advancing femtosecond laser technologies is three-dimensional micro- and nanostructuring by two-photon polymerization (2PP) technique. This technique allows the fabrication of any computer-generated 3D structure by direct laser "recording" into the volume of a photosensitive material. Because of the threshold behavior and nonlinear nature of the 2PP process, a resolution beyond the diffraction limit can be realized by controlling the laser pulse energy and number of applied pulses. Many different applications of 2PP technique are discussed.

Citation Download Citation

Sven Passinger, Roman Kiyan, Alexandr Ovsianikov, Carsten Reinhardt, and Boris Chichkov "3D nanomanufacturing with femtosecond lasers and applications", Proc. SPIE 6591, Nanotechnology III, 659104 (16 May 2007); https://doi.org/10.1117/12.721714

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