Paper
23 May 2007 Optical study of polymer infiltration into porous Si based structures
Author Affiliations +
Proceedings Volume 6593, Photonic Materials, Devices, and Applications II; 65931K (2007) https://doi.org/10.1117/12.722386
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain
Abstract
This work describes the infiltration of a polymeric solution into porous Si structures towards the fabrication of tunable photonic crystals (PC) and microcavities for photonics applications. The tunability is achieved by infiltrating the porous silicon based PCs by active organic materials, such as an emissive and nonlinear polymer called 2-methoxy-5-(2- ethylhexyloxy)-p-phenylenevinylene (namely MEH-PPV). This preliminary work shows the infiltration of this polymeric solution into PC based on macroporous Si structure as well as in microcavities based on multiple layers of microporous Si. The solidification of the polymer was obtained by the evaporation of the solvent. Various techniques of infiltration were studied to obtain an optimized filling of the pores. The infiltration was then characterized using photoluminescence measurements. Finally, we will report on the study of third harmonic generation (THG) in samples of porous silicon microcavity infiltrated with MEHPPV. The k-domain THG spectroscopy was applied and an increase of the THG intensity up to an order of magnitude was achieved for the filled microcavity.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Cheylan, F. Yu. Sychev, T. Murzina, T. Trifonov, A. Maydykovskiy, J. Puigdollers, R. Alcubilla, and G. Badenes "Optical study of polymer infiltration into porous Si based structures", Proc. SPIE 6593, Photonic Materials, Devices, and Applications II, 65931K (23 May 2007); https://doi.org/10.1117/12.722386
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Cited by 3 scholarly publications.
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KEYWORDS
Silicon

Polymers

Optical microcavities

Semiconducting wafers

Photonic crystals

Etching

Scanning electron microscopy

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