Practical implementation of the complex wavefront modulation model for optical alignment

Hanshin Lee; Gavin B. Dalton; Ian A. J. Tosh; Sug-Whan Kim

doi:10.1117/12.726244

18 June 2007 Practical implementation of the complex wavefront modulation model for optical alignment

Hanshin Lee, Gavin B. Dalton, Ian A. J. Tosh, Sug-Whan Kim

Proceedings Volume 6617, Modeling Aspects in Optical Metrology; 66170N (2007) https://doi.org/10.1117/12.726244
Event: Optical Metrology, 2007, Munich, Germany

Abstract

We discuss the implementation of the complex wavefront modulation model in practical optical alignment procedures and present its interim results. This modulation model describes the relation between the alignment state and the wavefront of a system, both are expressed in mathematical complex quantities. It addresses the importance of the coupled inter-element alignment effect to the resultant system wavefront. We utilise this effect in order to extract the alignment state of a system from measured optical wavefronts. We demonstrate the method's practical applicability to the real optical alignment procedure by showing alignment simulations of a centered three-mirror system.

Citation Download Citation

Hanshin Lee, Gavin B. Dalton, Ian A. J. Tosh, and Sug-Whan Kim "Practical implementation of the complex wavefront modulation model for optical alignment", Proc. SPIE 6617, Modeling Aspects in Optical Metrology, 66170N (18 June 2007); https://doi.org/10.1117/12.726244

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