Design of IDT for MOEMS angular velocity sensor

Yi Zhao; Shufen Chen

doi:10.1117/12.790912

22 February 2008 Design of IDT for MOEMS angular velocity sensor

Yi Zhao, Shufen Chen

Proceedings Volume 6622, International Symposium on Photoelectronic Detection and Imaging 2007: Laser, Ultraviolet, and Terahertz Technology; 66221R (2008) https://doi.org/10.1117/12.790912
Event: International Symposium on Photoelectronic Detection and Imaging: Technology and Applications 2007, 2007, Beijing, China

Abstract

The paper presents a novel structure design of Micro-Optic-Electro-Mechanical-System (MOEMS) angular velocity sensor and calculates the design parameters of InterDigital Transducer (IDT). The structure includes light readout system, SAW sensor system and signal processing system. A special point in the structure is adding a optical readout device based on the traditional SAW typed MEMS angular velocity sensor, there would be apparent advantages of higher precision, stronger anti-vibration capacity, and lower difficulty of processing techniques. SAW sensor is the key part of this design, its quality affects the sensitivity of Angular velocity sensor. In this paper, we calculated and simulate the parameter of IDT for MOEMS Angular velocity sensor.

Citation Download Citation

Yi Zhao and Shufen Chen "Design of IDT for MOEMS angular velocity sensor", Proc. SPIE 6622, International Symposium on Photoelectronic Detection and Imaging 2007: Laser, Ultraviolet, and Terahertz Technology, 66221R (22 February 2008); https://doi.org/10.1117/12.790912

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