Measuring the parallelism of the splitter grating used in a soft X-ray laser interferometer

Xin Tan; Ying Liu; Zheng-kun Liu; Shao-jun Fu D.V.M.

doi:10.1117/12.782518

19 November 2007 Measuring the parallelism of the splitter grating used in a soft X-ray laser interferometer

Xin Tan, Ying Liu, Zheng-kun Liu, Shao-jun Fu D.V.M.

Proceedings Volume 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 67240J (2007) https://doi.org/10.1117/12.782518
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

We present new progress of the diffraction grating interferometer being pre-aligned used a double frequency grating. To measure the parallelism of the double frequency grating to a nicety before being built in the interferometer, a device based on Diffraction Technique for measuring the parallelism of the double frequency grating is designed. It is built of a semiconductor laser, a collimator, gratings, a precision turnplate, a beeline workbench, a redressal shelves, a ccd detector. The system error of the device is analyzed in this paper, and the parallelism of the double frequency grating is measured by this device. The results demonstrate that the diffraction measuring device suits the parallelism measured the diffracting grating interferometer based on the double frequency grating of that parallelism can attain a high pre-aligning precision.

Citation Download Citation

Xin Tan, Ying Liu, Zheng-kun Liu, and Shao-jun Fu D.V.M. "Measuring the parallelism of the splitter grating used in a soft X-ray laser interferometer", Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67240J (19 November 2007); https://doi.org/10.1117/12.782518

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KEYWORDS

Diffraction gratings

Interferometers

Sensors

Measurement devices

X-ray lasers

Diffraction

Semiconductor lasers

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