Flame spray pyrolysis based nano-structured functional metal oxide layers for gas sensing applications

Nicolae Barsan; Lutz Mädler; Udo Weimar

doi:10.1117/12.731110

11 October 2007 Flame spray pyrolysis based nano-structured functional metal oxide layers for gas sensing applications

Nicolae Barsan, Lutz Mädler, Udo Weimar

Proceedings Volume 6769, Nanosensing: Materials, Devices, and Systems III; 676903 (2007) https://doi.org/10.1117/12.731110
Event: Optics East, 2007, Boston, MA, United States

Abstract

The contribution presents the results obtained in the last years by applying an established aerosol based production technology for metal oxide nanoparticles mainly used in catalysis and filler materials, the so called flame spray pyrolysis (FSP), to gas sensor fabrication. The final achievement of this technology is a fast and clean single step process to fabricate fully functionalized multilayer sensors. This is a substantial progress as it merges the two fundamental processes of producing the sensing material and fabricating the sensing element.

Citation Download Citation

Nicolae Barsan, Lutz Mädler, and Udo Weimar "Flame spray pyrolysis based nano-structured functional metal oxide layers for gas sensing applications", Proc. SPIE 6769, Nanosensing: Materials, Devices, and Systems III, 676903 (11 October 2007); https://doi.org/10.1117/12.731110

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