Characterization of surface relief gratings of submicron period

P. C. Logofătu; D. Apostol; Marie-Claude Castex; Ileana Apostol; V. Damian; Iuliana Iordache; Raluca Müller

doi:10.1117/12.756800

1 August 2007 Characterization of surface relief gratings of submicron period

P. C. Logofătu, D. Apostol, Marie-Claude Castex, Ileana Apostol, V. Damian, Iuliana Iordache, Raluca Müller

Author Affiliations +

Proceedings Volume 6785, ROMOPTO 2006: Eighth Conference on Optics; 67851V (2007) https://doi.org/10.1117/12.756800
Event: ROMOPTO 2006: Eighth Conference on Optics, 2006, Sibiu, Romania

Abstract

This paper deals with optical characterization of photo-polymer gratings for parameter control. The gratings were obtained using the photoinduced single step inscription of refractive optical elements technique. The optical characterization was done by measuring the specular and diffracted orders of a laser beam incident on the grating. This technique is specifically known as scatterometry. The laser was a He-Ne with 633 nm wavelength. The measured diffraction efficiencies contain information about the parameters to be determined of the grating, such as pitch, linewidth and shape of the ridges.

Citation Download Citation

P. C. Logofătu, D. Apostol, Marie-Claude Castex, Ileana Apostol, V. Damian, Iuliana Iordache, and Raluca Müller "Characterization of surface relief gratings of submicron period", Proc. SPIE 6785, ROMOPTO 2006: Eighth Conference on Optics, 67851V (1 August 2007); https://doi.org/10.1117/12.756800

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