Mechanisms of formation of nanostructures with atomic force microscopy

H. Lee; L. Peng; K. Wang; M. K. Yapici; J. Zou; H. Liang

doi:10.1117/12.760121

27 December 2007 Mechanisms of formation of nanostructures with atomic force microscopy

H. Lee, L. Peng, K. Wang, M. K. Yapici, J. Zou, H. Liang

Proceedings Volume 6799, BioMEMS and Nanotechnology III; 67990D (2007) https://doi.org/10.1117/12.760121
Event: SPIE Microelectronics, MEMS, and Nanotechnology, 2007, Canberra, ACT, Australia

Abstract

The scanning probe microscopy-based (SPM) lithography techniques have presented significant challenges in fabricating nanostructures. Using this technique with assistance of pulse current, direct deposition or oxidation can be introduced on material surfaces. In present research, we use an atomic force microscope (AFM) to write a solid (gold) feature onto a substrate (silicon) in ambient environment. During the contact-sliding, the material on the gold (Au) tip transferred onto the surface of the single crystalline silicon (Si). This transfer takes place atomically as shown on a smoothly worn Au tip. This process is almost as simple as writing a line with a pencil. Dispersion of thermal energy inducted through friction is discussed in this presentation.

Citation Download Citation

H. Lee, L. Peng, K. Wang, M. K. Yapici, J. Zou, and H. Liang "Mechanisms of formation of nanostructures with atomic force microscopy", Proc. SPIE 6799, BioMEMS and Nanotechnology III, 67990D (27 December 2007); https://doi.org/10.1117/12.760121

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available