Free-standing SU-8 gratings fabricated by sacrificial layer-assisted UV curing imprint

Xudi Wang; Zijun Zhang; Liangjin Ge; Yanlin Liao; Shaojun Fu

doi:10.1117/12.757290

21 November 2007 Free-standing SU-8 gratings fabricated by sacrificial layer-assisted UV curing imprint

Xudi Wang, Zijun Zhang, Liangjin Ge, Yanlin Liao, Shaojun Fu

Proceedings Volume 6827, Quantum Optics, Optical Data Storage, and Advanced Microlithography; 68271T (2007) https://doi.org/10.1117/12.757290
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

We present results on the nanofabrication of high density patterns in SU-8 resist, based on nanoimprinting combined with UV curing. The bilayer process using PMMA as sacrificial layer was developed to release the SU-8 layer to form three dimensional structures. The SU-8 displays excellent imprint property and well defined patterns are achieved at at low temperature, low pressure after demolding process. Using this technology, 300nm period SU-8 subwavelengh gratings and nanochannels were fabricated on flat substrate with good fidelity. This sacrificial layer-assisted UV curing imprint technology offers versatility and flexibility to stack polymer layers and sealed fluidic channels.

Citation Download Citation

Xudi Wang, Zijun Zhang, Liangjin Ge, Yanlin Liao, and Shaojun Fu "Free-standing SU-8 gratings fabricated by sacrificial layer-assisted UV curing imprint", Proc. SPIE 6827, Quantum Optics, Optical Data Storage, and Advanced Microlithography, 68271T (21 November 2007); https://doi.org/10.1117/12.757290

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