Nano-glass imprinting technology for next-generation optical devices

Junji Nishii

doi:10.1117/12.754846

28 November 2007 Nano-glass imprinting technology for next-generation optical devices

Junji Nishii

Proceedings Volume 6834, Optical Design and Testing III; 683403 (2007) https://doi.org/10.1117/12.754846
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

Sub-wavelength periodic structures are very attractive for several optical elements with functions such as polarization-independent diffraction, isolation, antireflection, and phase control. In this paper I will review the fabrication of one- and two-dimensional periodic structures upon the surface of oxide glasses using lithograph, etching and glass imprinting. A 4-channel demultiplexer and a superprism demultiplexer were fabricated upon silica plates. The latter exhibited a precise linear relationship between the wavelength and the change of the output angle, which reached 4.8° with the incident wavelength change of 1% for wavelengths of 1400-1500 nm. Fabrication of surface-relief gratings with high spatial frequencies directly on optical glasses was possible using an imprinting process. One-dimensional and two-dimensional periodic structures were formed reproducibly on a phosphate glass surface using thermally durable molds.

Citation Download Citation

Junji Nishii "Nano-glass imprinting technology for next-generation optical devices", Proc. SPIE 6834, Optical Design and Testing III, 683403 (28 November 2007); https://doi.org/10.1117/12.754846

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