Batch patterning micro circuits and sensors with excimer laser machine

Ren Yang; Ralph Pyka; Dennis Kramer; John Mata; Matt Souter; Steven Thompson

doi:10.1117/12.761957

23 February 2008 Batch patterning micro circuits and sensors with excimer laser machine

Ren Yang, Ralph Pyka, Dennis Kramer, John Mata, Matt Souter, Steven Thompson

Proceedings Volume 6880, Laser-based Micro- and Nanopackaging and Assembly II; 68800T (2008) https://doi.org/10.1117/12.761957
Event: Lasers and Applications in Science and Engineering, 2008, San Jose, California, United States

Abstract

This paper will present the direct photo patterning of micro circuits and sensors with a XeCl excimer laser photo ablation system. The working principle and the ablation equipment for photo ablation of conductive thin film on polymer are described. Both large sheets and reel-to-reel webs can be ablated on this excimer laser photo ablation system. The ablation strategies and alignment strategies for the micro circuits and sensors are introduced. The test results show ablation results with high resolution, high throughput, high yield and cost-efficiency. This clearly shows that excimer laser photo ablation of the conductive materials on polymer substrates is a good choice for industrial mass product fabrication of low priced, disposable micro circuit and sensor devices.

Citation Download Citation

Ren Yang, Ralph Pyka, Dennis Kramer, John Mata, Matt Souter, and Steven Thompson "Batch patterning micro circuits and sensors with excimer laser machine", Proc. SPIE 6880, Laser-based Micro- and Nanopackaging and Assembly II, 68800T (23 February 2008); https://doi.org/10.1117/12.761957

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