Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 6883, including the Title Page, Copyright information, Table of Contents, the Conference Committee listing, and Plenary Paper.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
"Front Matter: Volume 6883", Proc. SPIE 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics, 688301 (25 February 2008); https://doi.org/10.1117/12.791927
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CITATIONS
Cited by 2 scholarly publications and 2 patents.
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KEYWORDS
Microelectromechanical systems

Reliability

Digital micromirror devices

Photonics

Accelerated life testing

Manufacturing

Mirrors

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