Metamaterials for free space on a chip applications

Uriel Levy; Maxim Abashin; Kazuhiro Ikeda; Yeshaiahu Fainman

doi:10.1117/12.768148

6 February 2008 Metamaterials for free space on a chip applications

Uriel Levy, Maxim Abashin, Kazuhiro Ikeda, Yeshaiahu Fainman

Proceedings Volume 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics; 688307 (2008) https://doi.org/10.1117/12.768148
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

We present our recent progress on the design, fabrication and characterization of metamaterials that can be used as basic building blocks for "free space on a chip" nanophotonic system integration. These devices are realized by fabricating nanostructures with space variant duty cycle on Silicon on insulator (SOI) material platform. The devices are characterized with Heterodyne Nearfield Scanning Optical Microscope that allows a direct measurement of both amplitude and phase of the near field. Using the described concept, we show specific examples of light bending, focusing and splitting. A design for mode matching between two different waveguides is also shown.

Citation Download Citation

Uriel Levy, Maxim Abashin, Kazuhiro Ikeda, and Yeshaiahu Fainman "Metamaterials for free space on a chip applications", Proc. SPIE 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics, 688307 (6 February 2008); https://doi.org/10.1117/12.768148

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available