Dual-detector optical MEMS spectrum analyzer: advances, applications, and prospects

Thomas Otto; Ray Saupe; Alexander Weiss; Volker Stock; Kerstin Wiesner; Uwe Lampe; Maximilian Fleischer; Thomas Gessner

doi:10.1117/12.768356

11 February 2008 Dual-detector optical MEMS spectrum analyzer: advances, applications, and prospects

Thomas Otto, Ray Saupe, Alexander Weiss, Volker Stock, Kerstin Wiesner, Uwe Lampe, Maximilian Fleischer, Thomas Gessner

Proceedings Volume 6887, MOEMS and Miniaturized Systems VII; 68870D (2008) https://doi.org/10.1117/12.768356
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

The spectroscopy market is enduring and growing one, in which the near infrared spectroscopy by means of the advances plays an important and indispensable role. Some nameable advances are the noninvasive character, the rapidity, which allows real-time measurements or the flexible sampling and sample presentation. To establish near infrared spectroscopic methods and tests at a wide variety of applications new technological innovations are necessary. One of these technological innovations is a modern scanning micro mirror spectrometers. We have developed a small sized, light weight MOEMS-spectrometers for different spectral regions which are due to the optical parameters less expensive, more flexible and offer better performance than traditional spectrometers even yet. The central component of the optical set-up is a large area scanning micro mirror, which oscillates in resonance with 250Hz. Thus, to record a single spectrum only 4 milliseconds are necessary. One of the important factors of NIR spectroscopy, which affects qualitative and quantitative determination, is the sample presentation. For optimal signal processing different sample presentation techniques such as transmission and flow cells, integrating spheres and attenuated total reflection (ATR) probes were realized. Consequently in combination with chemometric methods e.g. partial least square or principal component analysis several applications could be performed and investigated. This article describes the principles and the advances of the promising technology as well as some realized applications. Furthermore influences of the sample presentation and calibration procedures will be discussed closer.

Citation Download Citation

Thomas Otto, Ray Saupe, Alexander Weiss, Volker Stock, Kerstin Wiesner, Uwe Lampe, Maximilian Fleischer, and Thomas Gessner "Dual-detector optical MEMS spectrum analyzer: advances, applications, and prospects", Proc. SPIE 6887, MOEMS and Miniaturized Systems VII, 68870D (11 February 2008); https://doi.org/10.1117/12.768356

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KEYWORDS

Spectrometers

Mirrors

Near infrared

Near infrared spectroscopy

Micromirrors

Spectroscopy

Microopto electromechanical systems

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