Problems in Quantitation in X-Ray Photoelectron Spectroscopy (XPS): the Use of Data Reduction Techniques to Obtain Peak Areas

B. L. Maschhoff; K. R. Zavadil; K. W. Nebesny; J. W. Fordemwalt; N. R. Armstrong

doi:10.1117/12.936607

12 August 1986 Problems in Quantitation in X-Ray Photoelectron Spectroscopy (XPS): the Use of Data Reduction Techniques to Obtain Peak Areas

B. L. Maschhoff, K. R. Zavadil, K. W. Nebesny, J. W. Fordemwalt, N. R. Armstrong

Author Affiliations +

Proceedings Volume 0690, X-Rays in Materials Analysis: Novel Applications and Recent Developments; (1986) https://doi.org/10.1117/12.936607
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

Problems in lineshape analysis for quantitation of XPS data on metals are reviewed. Comparison is made of deconvolution versus curve fitting approaches. Deconvolution methods successfully applied to AES data, using electron-energy-loss spectra, are not similarly successful with XPS data. An optimum approach is data fitting using previously formulated lineshapes that account for the large intrinsic energy losses which cause significant distortion of metal core level spectra.

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B. L. Maschhoff, K. R. Zavadil, K. W. Nebesny, J. W. Fordemwalt, and N. R. Armstrong "Problems in Quantitation in X-Ray Photoelectron Spectroscopy (XPS): the Use of Data Reduction Techniques to Obtain Peak Areas", Proc. SPIE 0690, X-Rays in Materials Analysis: Novel Applications and Recent Developments, (12 August 1986); https://doi.org/10.1117/12.936607

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